VACUUM CARRIER INTERFACE HAVING A SWITCHABLE REDUCED CAPACITY AIRLOCK CHAMBER
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United States of America Patent
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Issued Date -
Mar 17, 2016
app pub date -
Sep 17, 2014
filing date -
Sep 17, 2014
priority date (Note) -
Abandoned
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Abstract
A vacuum carrier interface configured to interface with a transfer module, the vacuum carrier interface including an input interface configured to receive one or more substrates at atmospheric pressure; a substrate handling manifold configured to receive the one or more substrates from the input interface at atmospheric pressure and interface with the transfer module in a vacuum; an output interface configured to deliver one or more substrates to the transfer module from the substrate handling manifold; a vacuum manifold base plate and a lower pedestal, which are spaced apart, the vacuum manifold base plate and the lower pedestal forming a chamber between a lower surface of the vacuum manifold base plate and an upper surface of the lower pedestal; and an indexer configured to raise and lower the vacuum manifold base plate and the lower pedestal.
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