OPTICAL COMPONENT

United States of America Patent

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app pub date
Nov 13, 2015
filing date
May 22, 2013

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Abandoned

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Abstract

An optical component includes a mechanism for reducing a radiation-induced influence on the displacement of an optical device.

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Patent Owner(s)

Patent Owner	Address
CARL ZEISS SMT GMBH	GERMANY COHEN OBERKOCHEN BADEN-WURTTEMBERG

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Inventor Name	Address	# of filed Patents	Total Citations
Eisenmenger, Johannes	Ulm, DE	19	137
Staicu, Adrian	Langenau, DE	3	9

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United States of America Patent

14941498

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14941498

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Abstract

First Claim

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