SPRAY REJUVENATION OF SPUTTERING TARGETS
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United States of America Patent
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Issued Date -
Mar 17, 2016
app pub date -
Nov 24, 2015
filing date -
Dec 16, 2011
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Abstract
In various embodiments, used sputtering targets are refurbished at least in part by maintaining a large obliquity angle between the spray-deposition gun and the depressed surface contour of the target during spray deposition of the target material.
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