Plasma treatment method, plasma treatment apparatus, and plasma-treated long object
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United States of America Patent
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Jan 29, 2019
Grant Date -
Mar 10, 2016
app pub date -
Apr 8, 2013
filing date -
Apr 8, 2013
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Abstract
A plasma treatment method subjects a long object to be treated to plasma treatment by placing the long object to be treated in contact with plasma, the density distribution of which varies while selectively passing the long object to be treated through an area having high plasma density so that a surface of the long object can be thoroughly and uniformly subjected to plasma treatment. The method is applied to a plasma treatment apparatus, and a plasma-treated long object can be obtained by the method.
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