METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOLID SURFACE SMOOTHING APPARATUS
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United States of America Patent
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app pub date -
Nov 4, 2015
filing date -
Oct 30, 2006
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Abandoned
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Abstract
A solid surface smoothing apparatus for smoothing a solid surface with a gas cluster ion beam includes a plurality of gas cluster ion beam emitters, each emitter having an irradiation axis and emitting a respective gas cluster ion beam along its irradiation axis onto the solid surface, wherein irradiation axes of the plurality of the gas cluster ion beam emitters are not parallel to each other so as to expose substances in the solid surface transferred laterally by collisions with gas clusters to collisions with other gas clusters so that the substances do not remain on the solid surface.
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