Importance

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Abstract

Some embodiments of the invention relate to a vacuum valve having at least one piston/cylinder arrangement for adjusting a first closure member between a first, a second, and a middle closure member position. In some embodiments, the piston/cylinder arrangement which is coupled mechanically to the first closure member has a cylinder unit and a piston unit. A first seal body and a second seal body can be displaced independently of one another axially relative to the cylinder unit and to the piston unit. A first axial stop of the cylinder unit and a third axial stop of the piston unit are arranged relative to one another such that, in the middle closure member position, the axial movability of the first seal body in the direction of a second pressure chamber is limited jointly by the first axial stop and the third axial stop.

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First Claim