ULTRASONIC CLEANING APPARATUS AND METHOD FOR CLEANING
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United States of America Patent
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Mar 10, 2016
app pub date -
Apr 9, 2014
filing date -
May 14, 2013
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Abstract
The present invention is directed to a method for cleaning that performs ultrasonic cleaning of an object to be cleaned by using a cleaning tank having a bottom face with an inclination, the method for cleaning in which the object to be cleaned is cleaned by using a plurality of the cleaning tanks and making the cleaning tanks lying next to each other have bottom faces with inclinations in different directions. As a result, in cleaning of a wafer by ultrasonic cleaning, it is possible to eliminate cleaning nonuniformity of the wafer.
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