REACTOR OF SUBSTRATE PROCESSING APPARATUS

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United States of America Patent

APP PUB NO 20160060757A1
SERIAL NO

14747213

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided is a reactor of a substrate processing apparatus. The reactor of the substrate processing apparatus is a reactor of a substrate processing apparatus for processing at least one substrate, the reactor having a horizontal cross-section provided in a shape having at least two curvature radii.

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Patent Owner(s)

Patent OwnerAddress
TERASEMICON CORPORATION164-5 JANGJI-RI DONGTAN-MYEON HWASEONG-SI GYEONGGI-DO 445-812

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KANG, Ho Young Hwaseong-si, KR 7 99
LEE, Byung Il Seongnam-si, KR 27 107

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