STRUCTURE EQUIPPED WITH AMORPHOUS CARBON FILM HAVING ELECTRICALLY CONDUCTIVE PART AND CONTAINING SILICON, AND METHOD FOR MANUFACTURING SAME
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United States of America Patent
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Issued Date -
Feb 25, 2016
app pub date -
Mar 31, 2014
filing date -
Apr 2, 2013
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Abandoned
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Abstract
In a structure according to an embodiment, an electrically conductive part on an amorphous carbon film can be appropriately formed, and the region surrounding the electrically conductive part of the amorphous carbon film can have increased friction resistance and wear resistance. The structure includes a substrate and an amorphous carbon film containing Si formed on the substrate and irradiated with a laser beam to have an electrically conductive part modified to have electric conductivity.
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