NANOPARTICLE DIFFERENTIATION DEVICE
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Feb 25, 2016
app pub date -
Mar 7, 2014
filing date -
Mar 25, 2013
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
A nanoparticle differentiation device 1 includes: a plurality of chambers 9 that are linearly arranged, and divided from each other by partitions 5; a generation chamber 2 that is provided with a material 4 to be vaporized; a plurality of film forming chambers 3a to 3c that are provided with respective substrates 7 on which nanoparticles 8a to 8c generated from the material 4 are film-formed; a plurality of communication tubes 6 that are provided to penetrate the respective partitions 5 in order to cause the adjoining chambers 9 to communicate with each other; a gas introducing tube 10 that communicates with the generation chamber 2 in order to introduce cooling gas; and a vacuum tube 14 that communicates with a high vacuum chamber 13 that is a chamber 9 arranged at a position farthest from the generation chamber 2, i.e., the film forming chamber 3c, among the chambers 9 in order to perform evacuation.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully