MEMS DEVICES AND METHOD OF MANUFACTURING
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United States of America Patent
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Issued Date -
Feb 25, 2016
app pub date -
Aug 25, 2014
filing date -
Aug 25, 2014
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Abstract
A MEMS sensor includes a sensor die configured to generate a sensor signal and a pedestal layer disposed on the sensor die. The pedestal layer includes a channel defined therein about a pedestal of the pedestal layer. The pedestal is configured to be mounted to a housing. A method for manufacturing MEMS sensors can include disposing a pedestal layer on a sensor layer, wherein the sensor layer defines a plurality of sensor dies to be cut therefrom. The method further includes defining a respective channel in the pedestal layer for each sensor die, thereby creating a pedestal for each sensor die.
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