MONOLITHICALLY INTEGRATED SURFACE EMITTING LASER WITH MODULATOR
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United States of America Patent
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Issued Date -
Feb 11, 2016
app pub date -
Aug 5, 2015
filing date -
Aug 8, 2014
priority date (Note) -
Abandoned
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Abstract
A surface emitting laser includes a structure in which a semiconductor substrate, a lower DBR, and an active layer are layered. A VCSEL (vertical cavity surface emitting laser) and an EAM (electro-absorption modulator) are formed adjacent to each other along a first direction defined on the substrate plane such that they are optically coupled. The EAM outputs an emitted light in a direction that is orthogonal to the substrate. The width of a waveguide region of the VCSEL defined in the second direction is narrower than the width of a waveguide region of the EAM.
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