FLEXIBLE HANDLING SYSTEM FOR SEMICONDUCTOR SUBSTRATES
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United States of America Patent
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Issued Date -
Feb 11, 2016
app pub date -
Mar 17, 2014
filing date -
Mar 15, 2013
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Abstract
A member that facilitates the handling of semiconductor devices of arbitrary shapes and sizes by handling equipment not normally adapted to handling such devices is herein described. The member includes a base that emulates a substrate for which handling equipment is available. A fixation device on the base secures a device to the member. A vacuum structure allows a vacuum clamping system to simultaneously secure the member and a device to the handling equipment.
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