Ultrasonic sensor microarray and its method of manufacture
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United States of America Patent
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Jan 2, 2018
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app pub date -
Mar 12, 2014
filing date -
Mar 14, 2013
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Abstract
A sensor assembly including one or more capacitive micromachined ultrasonic transducer (CMUT) microarray modules which are provided with a number of individual transducers. The microarray modules are arranged to simulate or orient individual transducers in a hyperbolic paraboloid geometry. The transducers/sensor are arranged in a rectangular or square matrix and are activatable individually, selectively or collectively to emit and received reflected beam signals at a frequency of between about 100 to 170 kHz.
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