Importance

Loading Importance Indicators...

Abstract

The present invention discloses a strip-shaped gate tunneling field effect transistor using composite mechanism and a fabrication method thereof, which belongs to a field of field effect transistor logic devices and circuits in the CMOS ultra large scale integrated circuit (ULSI). According to the tunneling field effect transistor, the energy band of the channel underneath the gate is elevated by means of a change of the gate morphology and the PN junction depletion effect occurred at both sides of the strip-shaped gate, so that the sub-threshold characteristics of the transistor are improved. Meanwhile, the on-state current of the transistor is effectively increased by means of the composite mechanism introduced by the two parts of the doped source region. Moreover, the bulk leakage current, including a source-to-drain direct tunneling current and a punching through current, which comes from the two parts of the doped source region to the doped drain region can be greatly suppressed through the design of the ‘’-shaped active region, so that the short channel effect is inhibited and thus the transistor can be applied with a smaller size.

Loading the Abstract Image...

First Claim