FINFET WITH STRESSORS

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United States of America Patent

SERIAL NO

14880296

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Abstract

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A fin type transistor includes a dielectric layer on a substrate surface which serves to isolate the gate of the transistor from the substrate. The dielectric layer includes a non-selectively etched surface to produce top portions of fin structures which have reduced height variations across the wafer. The fin type transistor may also include a buried stressor and/or raised or embedded raised S/D stressors to cause a strain in the channel to improve carrier mobility.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES SINGAPORE PTE LTD60 WOODLANDS INDUSTRIAL PARK D STREET 2 SINGAPORE 738406

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
LEE, Jae Gon Singapore, SG 65 797
QUEK, Elgin Singapore, SG 125 2412
TAN, Chung Foong Singapore, SG 41 792
TOH, Eng Huat Singapore, SG 256 1730

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