OPTICAL SYSTEM FOR GENERATING BEAM OF REFERENCE LIGHT AND METHOD FOR SPLITTING BEAM OF LIGHT TO GENERATE BEAM OF REFERENCE LIGHT
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Feb 4, 2016
app pub date -
Jul 14, 2015
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Jul 31, 2014
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Abstract
An optical system for generating at least one beam of reference light according to one aspect of the present invention includes an optical emitter configured to emit a first beam of light, and a beam splitter configured to split the first beam into a second beam of measuring light for irradiating a target to be measured and at least one third beam of reference light. The beam splitter is disposed to make an incident angle of the first beam into the beam splitter be less than 10 degrees.
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