OPTICAL SYSTEM FOR GENERATING BEAM OF REFERENCE LIGHT AND METHOD FOR SPLITTING BEAM OF LIGHT TO GENERATE BEAM OF REFERENCE LIGHT
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United States of America Patent
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Issued Date -
Feb 4, 2016
app pub date -
Jul 14, 2015
filing date -
Jul 31, 2014
priority date (Note) -
Published
status (Latency Note)
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Abstract
An optical system for generating at least one beam of reference light according to one aspect of the present invention includes an optical emitter configured to emit a first beam of light, and a beam splitter configured to split the first beam into a second beam of measuring light for irradiating a target to be measured and at least one third beam of reference light. The beam splitter is disposed to make an incident angle of the first beam into the beam splitter be less than 10 degrees.
First Claim
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| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| JP | A | JP2016033484 | Jul 31, 2014 |
| EP | A1 | EP2982965 | Jul 07, 2015 |
| CN | A | CN105319170 | Jul 29, 2015 |
International Classification(s)
- 2015 Application Filing Year
- G01J Class
- 1516 Applications Filed
- 1256 Patents Issued To-Date
- 82.85 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 2 Citation Count
- G01J Class
- 14.96 % this patent is cited more than
- 9 Age