High Strength Carbon Fiber Composite Wafers For Microfabrication
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United States of America Patent
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Feb 4, 2016
app pub date -
Oct 2, 2015
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May 16, 2011
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Abstract
A method of making a high strength carbon fiber composite (CFC) wafer with low surface roughness comprising at least one sheet of CFC including carbon fibers embedded in a matrix. A stack of at least one sheet of CFC is provided with the stack having a first surface and a second surface. The stack is pressed between first and second pressure plates with a porous breather layer disposed between the first surface of the stack and the first pressure plate. The stack is cured by heating the stack to a temperature of at least 50° C.
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