ROBUST PIEZOELECTRIC FLUID MOVING DEVICES AND METHODS
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United States of America Patent
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Issued Date -
Jan 28, 2016
app pub date -
Jul 24, 2014
filing date -
Jul 24, 2014
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Abstract
A method of making a piezoelectric fluid moving device, (e.g., a fan or synthetic jet actuator) includes forming at least a first electrode on a base substrate and disposing a spacer frame about the first electrode. A piezoelectric substrate is placed within the frame and over the first electrode. A cover substrate is located on the spacer frame. The cover substrate and spacer frame are laminated to each other and to the base substrate encapsulating the piezoelectric substrate between the cover substrate and the base substrate for a long life device.
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