IDENTIFICATION SYSTEM
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United States of America Patent
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Issued Date -
Jan 28, 2016
app pub date -
Jul 23, 2015
filing date -
Jul 25, 2014
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Abstract
Disclosed herein are systems and methods for identifying components of a system that may be used to treat microelectronic substrates. The components may not reside at the same location and may be out of visual range, such that technicians working on one system may not be able to distinguish the components of that system from other similar systems on manufacturing floor. In one embodiment, the components of the system may include status indicator lights that may indicate a common system status to enable the identification of the related components.
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