Atomic force microscopy of scanning and image processing
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United States of America Patent
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Nov 13, 2018
Grant Date -
Jan 28, 2016
app pub date -
Oct 2, 2015
filing date -
Apr 28, 2006
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Abstract
Apparatus and associated method that contemplates performing a first atomic force microscope (AFM) scan of a first region of a sample centered at a first position at a first angle to produce a first scan image, the first AFM scan including a first component scan at a first speed and a second component scan at a second speed; performing a second AFM scan of the first region of the sample at a second angle to produce a second scan image, the second AFM scan including performing a third component scan at the first speed and a fourth component scan at the second speed; and correcting a first error in the first scan image based on the second scan image to produce a corrected image output.
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