Super junction semiconductor device
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United States of America Patent
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Jan 9, 2018
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N/A
app pub date -
Jul 14, 2015
filing date -
Jul 18, 2014
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Abstract
Provided is a super junction semiconductor device. The super junction semiconductor device includes a vertical pillar region located in an active region and horizontal pillar regions located in a termination region that are connected with each other while simultaneously not floating the entire pillar region in the termination region. Thus, a charge compensation difference, generated among pillar regions, is caused to be offset, although the length of the termination region is relatively short.
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