Vertical hall sensor, hall sensor module and method for manufacturing the same

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United States of America Patent

PATENT NO 9864020
SERIAL NO

14594499

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Abstract

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A vertical Hall sensor, a Hall sensor module, and a method for manufacturing the same are provided. By applying a trench structure inside a substrate with respect to a ground terminal, a directional component parallel to surface of the substrate is maximized with respect to a current flow to detect the magnetic field with improved sensitivity.

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Patent Owner(s)

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SK KEYFOUNDRY INCCHEONGJU-SI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hebert, Francois San Mateo, US 187 3281

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