APPARATUS FOR MANUFACTURING Si-BASED NANO-PARTICLES USING PLASMA
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United States of America Patent
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Jan 21, 2016
app pub date -
Jul 15, 2015
filing date -
Jul 16, 2014
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Disclosed herein is an apparatus for manufacturing silicon-based nanoparticles such as Si—C composite and SiOx using plasmas. An apparatus for manufacturing silicon-based nanoparticles in accordance with one embodiment of the present disclosure comprises a reaction chamber for providing a reaction space; a plasma torch for generating plasma to decompose silicon (Si) precursors and produce Si particles, provided on an upper portion of the reaction chamber; a cooling part for cooling Si particles supplied into the reaction chamber, provided within the reaction chamber; and a carbon material supplying part for supplying carbonaceous materials or carbon precursors into the reaction chamber.
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