MICROELECTROMECHANICAL SYSTEMS HAVING CONTAMINANT CONTROL FEATURES
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United States of America Patent
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Jan 14, 2016
app pub date -
Apr 16, 2015
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Apr 17, 2014
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Microelectromechanical systems (MEMS) having contaminant control features. In some embodiments, a MEMS die can include a substrate and an electromechanical assembly implemented on the substrate. The MEMS die can further include a contaminant control component implemented relative to the electromechanical assembly. The contaminant control component can be configured to move contaminants relative to the electromechanical assembly. For example, such contaminants can be moved away from the electromechanical assembly.
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