Polishing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Dec 20, 2016
Grant Date -
Jan 14, 2016
app pub date -
Jul 6, 2015
filing date -
Jul 9, 2014
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A polishing apparatus which can continue stable operation of the apparatus without generating torsional vibration in a rotary joint and without generating an abnormal sound at an engagement part between a cooling water pipe and a polishing table is disclosed. The polishing apparatus includes a rotary joint fixed to a rotating part of the polishing table or a rotating part of the top ring to supply a fluid into the polishing table or the top ring and discharge the fluid from the polishing table or the top ring, and a rotation-prevention mechanism which connects the rotary joint with an apparatus frame to prevent the rotary joint from being rotated. The rotation-prevention mechanism includes a link mechanism having at least one spherical plain bearing.
First Claim
Other Claims data not available
Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| JP | B2 | JP6259366 | Jul 09, 2014 |
| SG | A | SG10201505284Q | Jul 03, 2015 |
| KR | B1 | KR102314416 | Jul 06, 2015 |
International Classification(s)
- 2015 Application Filing Year
- B24B Class
- 630 Applications Filed
- 508 Patents Issued To-Date
- 80.64 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- B24B Class
- 20.18 % this patent is cited more than
- 9 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jun 20, 2028 |
