MULTILAYER LINER FOR CHEMICAL VAPOR DEPOSITION FURNACE
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United States of America Patent
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Issued Date -
Jan 7, 2016
app pub date -
Jun 30, 2015
filing date -
Jul 2, 2014
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Abstract
A multilayer liner for a chemical vapor deposition furnace may include a first layer comprising graphite and a second layer comprising a metal or alloy. The first layer may define an internal surface of the multilayer liner, and the multilayer liner may define a substantially closed internal volume. In some examples, the metal or alloy may be the same as a metal or alloy that is in a substrate to be coated within an internal volume of the multilayer liner.
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