Cleaning Gas and Cleaning Method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20160002574A1
SERIAL NO

14767846

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A cleaning gas according to the present invention is intended for removing a silicon carbide-containing deposit on a base of at least partially graphitized carbon and is characterized by containing iodine heptafluoride. It is possible by the use of such a cleaning gas to remove silicon carbide without etching of graphite.

First Claim

See full text

Other Claims data not available

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
CENTRAL GLASS COMPANY LTD5253 OAZA OKIUBE UBE-SHI YAMAGUCHI 755-0001

International Classification(s)

loading....
  • 2014 Application Filing Year
  • B08B Class
  • 792 Applications Filed
  • 630 Patents Issued To-Date
  • 79.55 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20142015201620172018201920202021202220230255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KIKUCHI, Akiou Ube-shi, Yamaguchi, JP 29 122
OOMORI, Hiroyuki Ube-shi, Yamaguchi, JP 20 80
UMEZAKI, Tomonori Ube-shi, Yamaguchi, JP 17 107

Cited Art Landscape

Load Citation

Patent Citation Ranking

  • 2 Citation Count
  • B08B Class
  • 22.02 % this patent is cited more than
  • 9 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1905975481111101 - 1011 - 2021 - 3031 - 4041 - 5051 - 6091 - 100050100150200250300350400450500550600650

Forward Cite Landscape

Load Citation