LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
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United States of America Patent
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Jan 7, 2016
app pub date -
Feb 3, 2014
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Feb 5, 2013
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Abstract
A laser processing apparatus that condenses a laser beam into an annular shape to irradiate the condensing position of the laser beam within a thickness range of a substrate, and shifts the condensing position in such a manner that the center of the condensing position that is annular moves in a circular manner, at a stage of shifting the condensing position in a thickness direction of the substrate and a planar direction of the substrate.
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