HARDWARE FOR THE SEPARATION AND DEGASSING OF DISSOLVED GASES IN SEMICONDUCTOR PRECURSOR CHEMICALS
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United States of America Patent
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Issued Date -
Dec 31, 2015
app pub date -
Jun 30, 2014
filing date -
Jun 30, 2014
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Abstract
An apparatus for degassing gases having large gas molecules, such as argon, from liquids for use in semiconductor processing is provided. The apparatus includes a spool-free tubing in a cylindrical vessel with a removable lid and crystalline window. The apparatus is assembled by removing the lid, connecting the tubing via connectors to an inlet and outlet in the lid, and placing the tubing into the vessel with the lid, and securing the lid.
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