HEATED AFM LAYER DEPOSITION AND COOLING PROCESS FOR TMR MAGNETIC RECORDING SENSOR WITH HIGH PINNING FIELD
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United States of America Patent
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Issued Date -
Dec 31, 2015
app pub date -
Sep 3, 2015
filing date -
Dec 19, 2013
priority date (Note) -
Abandoned
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Abstract
Systems and methods are provided for manufacturing a magnetic recording sensor for use in a magnetic reader, such as a tunneling magnetoresistance (TMR) readers. The magnetic recording sensor can be manufactured by heating a substrate in a first chamber and depositing an antiferromagnetic (AFM) layer on the heated substrate. Additionally, a first pinned layer is added onto the AFM layer, and the substrate is subsequently cooled.
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