HEATED AFM LAYER DEPOSITION AND COOLING PROCESS FOR TMR MAGNETIC RECORDING SENSOR WITH HIGH PINNING FIELD

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United States of America Patent

APP PUB NO 20150380026A1
SERIAL NO

14844312

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Abstract

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Systems and methods are provided for manufacturing a magnetic recording sensor for use in a magnetic reader, such as a tunneling magnetoresistance (TMR) readers. The magnetic recording sensor can be manufactured by heating a substrate in a first chamber and depositing an antiferromagnetic (AFM) layer on the heated substrate. Additionally, a first pinned layer is added onto the AFM layer, and the substrate is subsequently cooled.

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WESTERN DIGITAL TECHNOLOGIES INC5601 GREAT OAKS PARKWAY SAN JOSE CA 95119

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  • 2015 Application Filing Year
  • G11B Class
  • 2174 Applications Filed
  • 1930 Patents Issued To-Date
  • 88.78 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances201520162017201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DIAO, ZHITAO FREMONT, US 47 2828
JIANG, XIN SAN JOSE, US 211 2822
KAISER, CHRISTIAN SAN JOSE, US 68 1719
LENG, QUNWEN PALO ALTO, US 57 3352
ZHAO, TONG FREMONT, US 226 3549
ZHENG, YUANKAI FREMONT, US 111 2192

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