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United States of America Patent
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Issued Date -
Dec 31, 2015
app pub date -
Feb 24, 2014
filing date -
Feb 25, 2013
priority date (Note) -
Published
status (Latency Note)
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Abstract
The present invention relates to a metrology system (100) for dimensional measurement of an object (200) comprising a light-projection device (110), LPD, configured to project an image (112) onto the object (200); a position-measurement device (120), PMD, having a measurement volume, configured to determine the position and/or the orientation of the LPD (110) disposed within the measurement volume; a dimensional acquisition device (140), DAD, that is an optical non-contact probe rigidly attached to the LPD configured to acquire dimensional data of the object (200); and an adjustment unit (130) configured to adjust the projected image (112) to have an essentially static appearance in relation to the object (200), which adjustment is responsive to movement of the LPD (110) detected by the PMD (120); wherein the image projected by the LPD (110) conveys feedback information to the user responsive to dimensional acquisition by the DAD (140).

First Claim
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
NIKON METROLOGY N V | GELDENAAKSEBAAN 329 HEVERLEE B-3001 |
International Classification(s)

- [Classification Symbol]
- [Patents Count]
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Thielemans, Hans | Rotselaar, BE | 4 | 29 |
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jun 30, 2027 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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