VARIABLE-TEMPERATURE MATERIAL GROWTH STAGES AND THIN FILM GROWTH
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Dec 31, 2015
app pub date -
Feb 13, 2014
filing date -
Feb 14, 2013
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A thin film of material on a substrate is formed in a continuous process of a physical vapor deposition system, in which material is deposited during a variable temperature growth stage having a first phase conducted below a temperature of about 500° C., and material is continuously deposited as the temperature changes for the second phase to above about 800° C.
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