Gas laser oscillator capable of estimating sealability of gas container
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United States of America Patent
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Feb 2, 2016
Grant Date -
Dec 24, 2015
app pub date -
Jun 5, 2015
filing date -
Jun 18, 2014
priority date (Note) -
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Abstract
A gas laser oscillator includes an output command part for outputting a power supply output command; a power supply unit for applying a discharge tube voltage corresponding to the power supply output command to the discharge tube to start discharge; a voltage detection part for detecting the discharge tube voltage; a discharge start determination part for determining whether or not the discharge has been started on the basis of a value detected by the voltage detection part when the power supply output command is gradually increased; and a sealability determination part for determining that sealability of the gas container has been reduced when a discharge start time from the application of the discharge tube voltage until when it is determined by the discharge start determination part that the discharge is started exceeds a predetermined first threshold value.
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