Tray and wafer holding apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Dec 5, 2017
Issued Date -
N/A
app pub date -
Jun 8, 2015
filing date -
Jun 23, 2014
priority date (Note) -
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Abstract
A tray includes a support base having both a first face on which a clamp object is placed and a second face opposite the first face, an upper electrode embedded in the support base and situated toward the first face, a lower electrode embedded in the support base and situated further toward the second face than the upper electrode is, and one or more interconnect lines configured to provide an electrical connection between the upper electrode and the lower electrode.
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