Method and device for controlling a scanning probe microscope
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United States of America Patent
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Nov 22, 2016
Grant Date -
Dec 24, 2015
app pub date -
Dec 12, 2013
filing date -
Dec 12, 2012
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Abstract
The present invention relates to a method for controlling a scanning probe microscope having a probe (2) with a tip (21) for interacting with a sample (4), and a nanoscanner (1) for retaining the sample (4) or the probe (2), comprising the steps of monitoring the extension of the piezo element (1) along a first direction (R) along which the tip (21) is moved towards the sample (4), and adjusting the level of the probe (2) along the first direction (R) by means of an additional actuator (3), when the nanoscanner (1) exhibits an extension below or above a threshold value. The invention further relates to a device (100) for controlling a scanning probe microscope.
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