MEMS FLOW CONTROL CHIP FOR GAS CHROMATOGRAPHY
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United States of America Patent
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Issued Date -
Dec 24, 2015
app pub date -
Jun 8, 2015
filing date -
Jun 6, 2014
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Abstract
A micro-electro-mechanical system (MEMS) flow control chip that can control the flow of gas and be configured to operate in a gas chromatography system are disclosed. The MEMS flow control chip can include at least one inlet port in the chip, at least one outlet port in the chip, at least one flow channel between the inlet and outlet ports, and at least one pneumatic valve in the chip for controlling a flow of gas through the flow channel and between the inlet port and outlet ports. Advantageously, the MEMS flow control chip can be positioned in an oven of the a gas chromatography system and have a temperature approximately the same as one or more chromatographic columns of the system.
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