Importance

Loading Importance Indicators...

Abstract

The present disclosure relates to the technical field of film thickness testing and discloses a film removing device. The film removing device includes a base, a carrying platform and a first baffle. The carrying platform is mounted on the base. A first side edge and a second side edge of the carrying platform are opposite to each other and in the direction from the first side edge towards the second side edge, the distance between the bearing surface and the base can be increased. The first baffle is mounted on the carrying platform and located on a side of the carrying platform facing away from the base. The first baffle has a sealing face, which is hermetically matched with a face of a substrate to be processed facing away from the carrying platform when the substrate to be processed is placed on the bearing surface; and a notch, inner walls of which are cooperated with the face of the substrate to be processed facing away from the carrying platform when the substrate to be processed is placed on the bearing surface so as to form a collecting slot opening to the first side edge of the bearing surface. The inner walls of the notch have a stop face facing towards the first side edge. The first baffle has a plurality of liquid guiding holes formed therein. The film removing device can create a distinct boundary after removing a portion of the film, so that the accuracy of the film thickness test can be increased.

Loading the Abstract Image...

First Claim