INFRARED DETECTOR WITH SWNT-BASED DOUBLE-CANTILEVER AND MANUFACTURE THEREOF

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United States of America Patent

APP PUB NO 20150364691A1
SERIAL NO

14732830

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Abstract

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A double-cantilever infrared detector based on single walled carbon nanotube and the manufacture method thereof are provided. The detector comprises: a substrate having a detection window extending through the substrate from the top surface to the bottom surface; two heterogeneous cantilevers, wherein each cantilever is located on the substrate and has a fixed end connected to the substrate and a free end suspended above the detection window; a single walled carbon nanotube film bridged between the two free ends of the two heterogeneous composite cantilevers, wherein the heterogeneous cantilevers include a first material layer and a second material layer located thereon, and the first material layer and the second material layer have different thermal expansion coefficients.

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Patent Owner(s)

Patent OwnerAddress
SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINANO 1088 XILI XUEYUAN AVENUE NANSHAN DISTRICT SHENZHEN GUANGDONG PROVINCE SHENZHEN CITY GUANGDONG PROVINCE 518055

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wang, Fei Shenzhen, Guangdong, CN 1116 10607
Zhang, Shaoda Shenzhen, Guangdong, CN 8 2

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