SEMICONDUCTOR DEVICE WITH SILICON CARBIDE EMBEDDED DUMMY PATTERN
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United States of America Patent
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Issued Date -
Dec 17, 2015
app pub date -
Jun 11, 2014
filing date -
Jun 11, 2014
priority date (Note) -
Abandoned
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Abstract
A semiconductor device with dummy patterns for alleviating micro-loading effect includes a semiconductor substrate having thereon a middle annular region between an inner region and an outer region; a SiC device on the semiconductor substrate within the inner region; and a plurality of dummy patterns provided on the semiconductor substrate within the middle annular region. At least one of the dummy patterns contains SiC.
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