PROTECTIVE COATINGS FOR ELECTRONIC DEVICES AND ATOMIC LAYER DEPOSITION PROCESSES FOR FORMING THE PROTECTIVE COATINGS
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United States of America Patent
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Issued Date -
Dec 17, 2015
app pub date -
Jun 15, 2015
filing date -
Jun 13, 2014
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Abstract
A protective coating for an electronic device, such as a coating that is substantially impermeable to moisture and oxygen, comprises an ultra-thin film comprising a plurality of sub-layers formed by atomic layer deposition (ALD) processes. Low temperature ALD processes may be used to form the sub-layers of the protective coating. The density of the protective film may be enhanced with energy, to which the protective coating or sub-layers thereof may be exposed during deposition or intermittently during the deposition process. ALD apparatuses that are equipped to perform the disclosed processes are also disclosed, as are electronic devices that include the disclosed protective coatings.
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