Injection Assembly in Linear Deposition Apparatus with Bulging Ridges Extending along Bottom Openings
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United States of America Patent
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Issued Date -
Dec 17, 2015
app pub date -
Jun 12, 2014
filing date -
Jun 12, 2014
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Embodiments relate to an injection module assembly (IMA) including a body and injectors installed in a module block. The body is formed with a plurality of openings defined by walls extending from the bottom surface to the top surface. Each of the walls includes bulging ridges at the bottom along bottom portions of the injectors. The bulging ridges prevent gas or radicals injected by adjacent injectors from mixing at locations other than on the top surface of a substrate placed below the IMA. Accordingly, the injectors can be placed with closer proximity to each other despite the compact size of the IMA.
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