POLISHING PAD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20150360342A1
SERIAL NO

14761297

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A polishing pad includes a polishing layer, and the polishing layer is formed of a reaction cured body of a polyurethane-forming raw material composition that contains: an isocyanate-terminated prepolymer (A) which is obtained by reacting a prepolymer-forming raw material composition (a) that contains an isocyanate component and a polyester polyol; an isocyanate-terminated prepolymer (B) which is obtained by reacting a prepolymer-forming raw material composition (b) that contains an isocyanate component and a polyether polyol; and a chain extender. The polyether polyol contains a polyether polyol (C) that has a number average molecular weight of 1000 or less and a polyether polyol (D) that has a number average molecular weight of 1900 or more. The reaction cured body has a triple phase separation structure.

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Patent Owner(s)

Patent OwnerAddress
ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS INC451 BELLEVUE ROAD NEWARK DE 19713

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
SHIMIZU, Shinji Osaka, JP 75 1181

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