Linear Deposition Apparatus with Modular Assembly
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United States of America Patent
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N/A
Issued Date -
Dec 17, 2015
app pub date -
Jun 11, 2014
filing date -
Jun 11, 2014
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Embodiments relate to an injection module assembly (IMA) including a body and replaceable injectors installed in a module block. Each of the injectors includes a protruding leg that is received in a support hole formed in the module block. The protruding leg provides support for the injector while an end block at an opposite end of the injector is secured to the module block. The end block and the protruding leg enable convenient mounting or removal of the module.
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