COATING FILM REMOVING APPARATUS
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United States of America Patent
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app pub date -
Aug 20, 2015
filing date -
Feb 21, 2013
priority date (Note) -
Abandoned
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Abstract
A coating film removing apparatus includes a removal liquid supply device which has a discharge port and discharges removal liquid through the discharge port such that the removal liquid for removing a coating film on a substrate is discharged only to a coating film removal portion of the coating film, and a removal liquid recovery device which has a recovery port and recovers the removal liquid through the recovery port. The removal liquid supply device discharges a predetermined quantity of the removal liquid to the coating film removal portion in a state where the discharge port and the recovery port are positioned to face the coating film removal portion such that the removal liquid discharged through the discharge port is recovered through the recovery port.
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