LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
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United States of America Patent
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app pub date -
Jun 11, 2015
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Jan 31, 2013
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Abstract
There may be included: a master oscillator configured to output pulsed laser light; a power amplifier disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and a wavelength filter disposed between the master oscillator and the power amplifier in the optical path of the pulsed laser light, and configured to allow the pulsed laser light to pass therethrough and suppress transmission of light with a wavelength other than a wavelength of the pulsed laser light.
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