ROTATING DISK CARRIER WITH PBN HEATER
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United States of America Patent
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Issued Date -
Dec 3, 2015
app pub date -
May 27, 2014
filing date -
May 27, 2014
priority date (Note) -
Abandoned
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Abstract
Various embodiments provide a substrate carrier configured to rotatably carry at least one substrate through a plurality of processing stations. The substrate carrier includes an integrated heater for heating a first side of the substrate while the second side of the substrate undergoes one or more manufacturing processes at each of the plurality of processing stations, e.g., to promote the desired growth of HAMR media. This can result in the elimination of one or more processing stations, thereby realizing cost savings, decreased substrate processing time, as well as a reduced area within which a substrate processing system can be implemented.
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