PLASMA EQUIPMENT FOR TREATING POWDER

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United States of America Patent

SERIAL NO

14409399

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Abstract

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A powder plasma processing apparatus is disclosed. The powder plasma processing apparatus is a powder plasma processing apparatus of a circular surface discharge plasma module, and the apparatus includes a plate-like electrode layer serving as an external surface of the circular surface discharge plasma module, an insulating layer disposed on an internal surface of the plate-like electrode layer, and a plasma generating electrode disposed on the insulating layer, wherein the circular surface discharge plasma module rotates, an alternating voltage is applied to the plasma generating electrode and the plate-like electrode layer to generate plasma around the plasma generating electrode, and a powder for plasma processing is processed by the plasma within the circular surface discharge plasma module.

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Patent Owner(s)

Patent OwnerAddress
KOREA BASIC SCIENCE INSTITUTE169-148 GWAHAK-RO YUSEONG-GU DAEJEON 34133

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
JEONG, Hyun Young Gunsan-si, KR 4 2
JUNG, Yong Ho Seoul, KR 15 11
SEOK, Dong Chan Daejeon, KR 11 7

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