PHOTO-DESTROYABLE QUENCHER AND ASSOCIATED PHOTORESIST COMPOSITION, AND DEVICE-FORMING METHOD

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United States of America Patent

APP PUB NO 20150346599A1
SERIAL NO

14289720

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Abstract

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A photo-destroyable quencher has the structure

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Patent Owner(s)

Patent OwnerAddress
ROHM AND HAAS ELECTRONIC MATERIALS LLC455 FOREST STREET MARLBOROUGH MA 01752

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
LaBeaume, Paul J Auburn, US 36 197

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