Photopatternable glass micro electrochemical cell and method
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United States of America Patent
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Dec 26, 2017
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app pub date -
Sep 26, 2014
filing date -
Jun 2, 2014
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Abstract
A micro electrochemical cell, a micro electrochemical gas sensor, and a method for fabrication of the micro electrochemical cell are described that include a photopatternable glass substrate, two or more embedded electrodes integrated with through-glass vias, and a gas-permeable membrane lid. In an implementation, a micro electrochemical cell includes a photopatternable glass substrate; at least one recess formed in the photopatternable glass substrate; a plurality of through-glass vias formed in the photopatternable glass substrate, at least one electrolyte disposed in the at least one recess; a wicking layer disposed over the at least one electrolyte; and a lid assembly.
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